Название: Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Автор: Imin Kao, Chunhui Chung
Издательство: John Wiley & Sons
Год: 2021
Страниц: 305
Размер: 12.09 МБ
Формат: PDF
Язык: English
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.